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WIRE -1808 -240 -1840 -240 WIRE -1792 -240 -1792 -336 WIRE -1792 -240 -1808 -240 WIRE -1744 -240 -1792 -240 WIRE -1648 -240 -1648 -336 WIRE -1648 -240 -1680 -240 WIRE -1632 -240 -1648 -240 WIRE -1552 -240 -1632 -240 WIRE -1504 -240 -1552 -240 WIRE -1376 -240 -1424 -240 WIRE -1328 -240 -1376 -240 WIRE -1200 -240 -1248 -240 WIRE -1136 -240 -1200 -240 WIRE -1104 -240 -1136 -240 WIRE -2272 -224 -2272 -288 WIRE -2240 -224 -2272 -224 WIRE -2752 -208 -2800 -208 WIRE -2704 -208 -2752 -208 WIRE -2576 -208 -2576 -288 WIRE -2576 -208 -2624 -208 WIRE -2528 -208 -2576 -208 WIRE -2144 -208 -2176 -208 WIRE -2064 -208 -2064 -240 WIRE -2064 -208 -2080 -208 WIRE -2400 -192 -2400 -288 WIRE -2400 -192 -2464 -192 WIRE -2336 -192 -2400 -192 WIRE -2240 -192 -2336 -192 WIRE -2928 -176 -2928 -192 WIRE -2528 -176 -2576 -176 WIRE -1808 -160 -1808 -240 WIRE -1760 -160 -1808 -160 WIRE -1376 -160 -1376 -240 WIRE -1328 -160 -1376 -160 WIRE -2576 -144 -2576 -176 WIRE -1632 -144 -1632 -240 WIRE -1632 -144 -1696 -144 WIRE -1200 -144 -1200 -240 WIRE -1200 -144 -1264 -144 WIRE -1760 -128 -1808 -128 WIRE -1328 -128 -1376 -128 WIRE -1808 -96 -1808 -128 WIRE -1376 -96 -1376 -128 WIRE -2880 -16 -2928 -16 WIRE -2704 -16 -2880 -16 WIRE -2576 -16 -2624 -16 WIRE -2528 -16 -2576 -16 WIRE -2400 -16 -2448 -16 WIRE -2064 -16 -2064 -208 WIRE -2064 -16 -2272 -16 WIRE -2928 0 -2928 -16 WIRE -2272 48 -2272 -16 WIRE -2240 48 -2272 48 WIRE -2752 64 -2752 -208 WIRE -2704 64 -2752 64 WIRE -2576 64 -2576 -16 WIRE -2576 64 -2624 64 WIRE -2528 64 -2576 64 WIRE -2144 64 -2176 64 WIRE -2064 64 -2064 -16 WIRE -2064 64 -2080 64 WIRE -2400 80 -2400 -16 WIRE -2400 80 -2464 80 WIRE -2336 80 -2400 80 WIRE -2240 80 -2336 80 WIRE -2928 96 -2928 80 WIRE -2528 96 -2576 96 WIRE -2576 128 -2576 96 WIRE -2336 224 -2352 224 WIRE -1936 224 -1952 224 WIRE -2864 240 -2912 240 WIRE -2352 256 -2352 224 WIRE -2352 256 -2400 256 WIRE -2304 256 -2352 256 WIRE -1952 256 -1952 224 WIRE -1952 256 -2000 256 WIRE -1904 256 -1952 256 WIRE -2912 272 -2912 240 WIRE -2400 288 -2400 256 WIRE -2304 288 -2304 256 WIRE -2000 288 -2000 256 WIRE -1904 288 -1904 256 WIRE -2448 304 -2464 304 WIRE -2240 304 -2256 304 WIRE -2048 304 -2064 304 WIRE -1840 304 -1856 304 WIRE -1104 352 -1104 -240 WIRE -1104 352 -1232 352 WIRE -2448 368 -2448 352 WIRE -2256 368 -2256 352 WIRE -2048 368 -2048 352 WIRE -1856 368 -1856 352 WIRE -2912 384 -2912 352 WIRE -1104 384 -1104 352 WIRE -1232 416 -1232 352 WIRE -1232 416 -1280 416 WIRE -2624 432 -2720 432 WIRE -2528 432 -2576 432 WIRE -2304 432 -2304 368 WIRE -2304 432 -2528 432 WIRE -1904 432 -1904 368 WIRE -1904 432 -2304 432 WIRE -1536 432 -1904 432 WIRE -1344 432 -1536 432 WIRE -2624 448 -2624 432 WIRE -1232 448 -1280 448 WIRE -2576 464 -2576 432 WIRE -1232 512 -1232 448 WIRE -1104 512 -1104 464 WIRE -1104 512 -1232 512 WIRE -2624 544 -2624 528 WIRE -2576 544 -2576 512 WIRE -2576 544 -2624 544 WIRE -2624 560 -2624 544 WIRE -1104 576 -1104 512 WIRE -1104 576 -1232 576 WIRE -1056 576 -1104 576 WIRE -1104 608 -1104 576 WIRE -1232 624 -1232 576 WIRE -1232 624 -1280 624 WIRE -2624 640 -2720 640 WIRE -2528 640 -2576 640 WIRE -2400 640 -2400 368 WIRE -2400 640 -2528 640 WIRE -2000 640 -2000 368 WIRE -2000 640 -2400 640 WIRE -1536 640 -2000 640 WIRE -1344 640 -1536 640 WIRE -2624 656 -2624 640 WIRE -1232 656 -1280 656 WIRE -2576 672 -2576 640 WIRE -1232 736 -1232 656 WIRE -1104 736 -1104 688 WIRE -1104 736 -1232 736 WIRE -2624 752 -2624 736 WIRE -2576 752 -2576 720 WIRE -2576 752 -2624 752 WIRE -2624 768 -2624 752 WIRE -1104 768 -1104 736 FLAG -2928 -432 0 FLAG -2880 -544 set FLAG -1056 576 Vo FLAG -1136 -240 Va FLAG -1104 768 0 FLAG -2576 -400 0 FLAG -2336 224 fb FLAG -1552 -240 Vctl FLAG -2528 640 v_mv FLAG -1808 -96 0 FLAG -1376 -96 0 FLAG -2864 240 fmode FLAG -2912 384 0 FLAG -2448 368 0 FLAG -2464 304 fmode FLAG -2256 368 0 FLAG -2240 304 fmode FLAG -2720 640 MV FLAG -2624 768 0 FLAG -1536 640 v_mv FLAG -2528 432 v_mi FLAG -2720 432 MI FLAG -2624 560 0 FLAG -1536 432 v_mi FLAG -2752 -464 fb FLAG -1936 224 fb_cl FLAG -2048 368 0 FLAG -2064 304 fmode FLAG -1856 368 0 FLAG -1840 304 fmode FLAG -2576 -144 0 FLAG -2928 -176 0 FLAG -2880 -288 set_clp FLAG -2368 -448 err FLAG -2336 -192 err_clp FLAG -2576 128 0 FLAG -2928 96 0 FLAG -2880 -16 set_cln FLAG -2336 80 err_cln FLAG -2800 -208 fb_cl FLAG -1968 -240 err_xo SYMBOL voltage -2928 -544 R0 WINDOW 0 -115 41 Left 2 WINDOW 3 -494 40 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 SYMATTR InstName V_SET SYMATTR Value PWL(0us 0 0.1us {-set}) SYMBOL res -1120 368 R0 WINDOW 0 48 37 Left 2 WINDOW 3 36 89 Left 2 SYMATTR InstName Rs SYMATTR Value {Rs} SYMBOL res -1120 592 R0 WINDOW 0 46 32 Left 2 WINDOW 3 39 87 Left 2 SYMATTR InstName Rdut SYMATTR Value {Rdut} SYMBOL cap -1680 -256 R90 WINDOW 0 0 32 VBottom 2 WINDOW 3 32 32 VTop 2 SYMATTR InstName Cint SYMATTR Value 1nF SYMBOL res -2720 -528 R270 WINDOW 0 39 26 VTop 2 WINDOW 3 67 88 VBottom 2 SYMATTR InstName R1 SYMATTR Value 10k SYMBOL res -2720 -448 R270 WINDOW 0 41 26 VTop 2 WINDOW 3 68 82 VBottom 2 SYMATTR InstName R2 SYMATTR Value 10k SYMBOL res -2432 -560 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R3 SYMATTR Value 10k SYMBOL res -1824 -256 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName Rint SYMATTR Value 100k SYMBOL OpAmps\\opamp -1728 -208 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U2 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL res -1664 -352 R90 WINDOW 0 -9 96 VBottom 2 WINDOW 3 -36 8 VTop 2 SYMATTR InstName RD1 SYMATTR Value 1e9 SYMBOL res -1408 -256 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R4 SYMATTR Value 10k SYMBOL OpAmps\\opamp -1296 -208 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U3 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL res -1232 -256 R90 WINDOW 0 -7 54 VBottom 2 WINDOW 3 36 40 VTop 2 SYMATTR InstName R5 SYMATTR Value 10k SYMBOL OpAmps\\opamp -1312 496 R180 WINDOW 0 24 96 Left 2 WINDOW 3 1 29 Left 2 WINDOW 39 -25 -2 Left 2 SYMATTR InstName U4 SYMATTR Value inamp1 SYMATTR SpiceLine Rg=12.35k SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -1312 704 R180 WINDOW 0 19 98 Left 2 WINDOW 3 2 28 Left 2 WINDOW 39 -12 -4 Left 2 SYMATTR InstName U5 SYMATTR Value inamp1 SYMATTR SpiceLine Rg=1e12 SYMATTR SpiceLine2 "" SYMBOL voltage -2912 256 R0 WINDOW 3 -122 93 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 WINDOW 0 -122 21 Left 2 SYMATTR Value {fmode} SYMATTR InstName VFMODE SYMBOL sw -2400 384 M180 WINDOW 0 -39 110 Left 2 WINDOW 3 -63 -18 Left 2 SYMATTR InstName S1 SYMATTR Value SW1 SYMBOL sw -2304 384 R180 WINDOW 0 -41 108 Left 2 WINDOW 3 -70 -19 Left 2 SYMATTR InstName S2 SYMATTR Value SW2 SYMBOL e -2624 640 M0 SYMATTR InstName E_MV SYMATTR Value { 1.0 } SYMBOL e -2624 432 M0 SYMATTR InstName E_MI SYMATTR Value {0.01 / 5} SYMBOL sw -2000 384 M180 WINDOW 0 -42 109 Left 2 WINDOW 3 -69 -22 Left 2 SYMATTR InstName S3 SYMATTR Value SW2 SYMBOL sw -1904 384 R180 WINDOW 0 -40 113 Left 2 WINDOW 3 -71 -20 Left 2 SYMATTR InstName S4 SYMATTR Value SW1 SYMBOL res -2720 -272 R270 WINDOW 0 40 30 VTop 2 WINDOW 3 67 88 VBottom 2 SYMATTR InstName R6 SYMATTR Value 10k SYMBOL res -2720 -192 R270 WINDOW 0 39 29 VTop 2 WINDOW 3 68 82 VBottom 2 SYMATTR InstName R7 SYMATTR Value 10k SYMBOL res -2432 -304 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R8 SYMATTR Value 10k SYMBOL voltage -2928 -288 R0 WINDOW 0 -156 41 Left 2 WINDOW 3 -504 40 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 SYMATTR InstName V_SETCLP SYMATTR Value PWL(0us 0 0.1us {-set_cl}) SYMBOL res -2064 -480 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R9 SYMATTR Value 10k SYMBOL diode -2080 -224 R90 WINDOW 0 0 32 VBottom 2 WINDOW 3 32 32 VTop 2 SYMATTR InstName D1 SYMATTR Value 1N914 SYMBOL res -2720 0 R270 WINDOW 0 40 28 VTop 2 WINDOW 3 67 88 VBottom 2 SYMATTR InstName R10 SYMATTR Value 10k SYMBOL res -2720 80 R270 WINDOW 0 41 26 VTop 2 WINDOW 3 68 82 VBottom 2 SYMATTR InstName R11 SYMATTR Value 10k SYMBOL res -2432 -32 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R12 SYMATTR Value 10k SYMBOL voltage -2928 -16 R0 WINDOW 0 -159 38 Left 2 WINDOW 3 -528 33 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 SYMATTR InstName V_SETCLN SYMATTR Value PWL(0us 0 0.1us {set_cl}) SYMBOL diode -2144 80 R270 WINDOW 0 32 32 VTop 2 WINDOW 3 0 32 VBottom 2 SYMATTR InstName D2 SYMATTR Value 1N914 SYMBOL OpAmps\\opamp -2496 -512 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U1 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -2496 -256 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U6 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -2496 16 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U7 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -2208 -528 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U8 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -2208 -272 R0 WINDOW 0 8 94 Left 2 WINDOW 3 -23 119 Left 2 SYMATTR InstName U9 SYMATTR Value opamp1 SYMATTR SpiceLine Aol=1e6 SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -2208 0 R0 WINDOW 0 6 97 Left 2 WINDOW 3 -20 121 Left 2 SYMATTR InstName U10 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" TEXT -3776 -600 Left 2 ;SMU FVFI Basic w Clamp TEXT -3768 -560 Left 2 !.tran 2000us TEXT -2992 -608 Left 2 ;Set Force TEXT -2560 -616 Left 2 ;Error Force TEXT -1800 -448 Left 2 ;Controller\n(Integrator) TEXT -1368 -448 Left 2 ;Output Amp TEXT -984 384 Left 2 ;Current\nSense TEXT -976 592 Left 2 ;Device\nUnder\nTest TEXT -2448 192 Left 2 ;Feedback - Force TEXT -1808 -720 Left 2 ;.param fmode=0V set=1V set_cl=1mA/10mA*5V Rs=100 Rdut=1000 TEXT -1808 -688 Left 2 !.param fmode=5V set=1mA/10mA*5V set_cl=2V Rs=100 Rdut=1000 TEXT -1440 336 Left 2 ;Measure Current TEXT -1432 560 Left 2 ;Measure Voltage TEXT -2992 808 Left 2 ;bot TEXT -3832 240 Left 2 !* pin order in- in+ out\n.SUBCKT OPAMP1 1 2 4\n*\nGGAIN 0 3 2 1 1\nRP1 3 0 1e6\nEBUF 4 0 3 0 1.0\n*\n* V Limit\nVP 10 0 +15V\nVN 11 0 -15V\nD1 3 10 1N914\nD2 11 3 1N914\n.ENDS TEXT -3848 688 Left 2 !* pin order in- in+ out\n.SUBCKT INAMP1 1 2 3\n*EGAIN 3 0 2 1 5\nEGAIN 3 0 value={(V(2)-V(1))*(1+49.4k/Rg)}\n.ENDS TEXT -2280 728 Left 2 !.model SW1 SW(Ron=1 Roff=1e12 Von=0V Voff=5V ) TEXT -2280 760 Left 2 !.model SW2 SW(Ron=1 Roff=1e12 Von=5V Voff=0V ) TEXT -2856 296 Left 2 ;0V = FV\n5V = FI TEXT -1184 392 Left 3 ;+\nVs\n- TEXT -1184 616 Left 3 ;+\nVo\n- TEXT -2040 192 Left 2 ;Feedback - Clamp TEXT -2992 -344 Left 2 ;Set - Clamp POS TEXT -2592 -352 Left 2 ;Error - Clamp POS TEXT -2992 -72 Left 2 ;Set - Clamp NEG TEXT -2584 -72 Left 2 ;Error - Clamp NEG TEXT -2216 -616 Left 2 ;Crossover TEXT -2920 200 Left 2 ;Force Mode RECTANGLE Normal -2032 160 -2288 -560 1