Version 4.1 SHEET 1 968 744 WIRE -2416 -336 -2608 -336 WIRE -2336 -336 -2416 -336 WIRE -1776 -336 -1808 -336 WIRE -1664 -336 -1696 -336 WIRE -2608 -304 -2608 -336 WIRE -2336 -304 -2336 -336 WIRE -2208 -304 -2256 -304 WIRE -2080 -304 -2128 -304 WIRE -2080 -240 -2080 -304 WIRE -2016 -240 -2080 -240 WIRE -1952 -240 -2016 -240 WIRE -1824 -240 -1872 -240 WIRE -1808 -240 -1808 -336 WIRE -1808 -240 -1824 -240 WIRE -1760 -240 -1808 -240 WIRE -1664 -240 -1664 -336 WIRE -1664 -240 -1696 -240 WIRE -1648 -240 -1664 -240 WIRE -1584 -240 -1648 -240 WIRE -1520 -240 -1584 -240 WIRE -1376 -240 -1440 -240 WIRE -1328 -240 -1376 -240 WIRE -1200 -240 -1248 -240 WIRE -1136 -240 -1200 -240 WIRE -1104 -240 -1136 -240 WIRE -2608 -192 -2608 -224 WIRE -2336 -192 -2336 -224 WIRE -2256 -192 -2256 -304 WIRE -2256 -192 -2336 -192 WIRE -2208 -192 -2256 -192 WIRE -2080 -176 -2080 -240 WIRE -2080 -176 -2144 -176 WIRE -2336 -160 -2336 -192 WIRE -2208 -160 -2256 -160 WIRE -2256 -128 -2256 -160 WIRE -1824 -128 -1824 -240 WIRE -1776 -128 -1824 -128 WIRE -1376 -128 -1376 -240 WIRE -1328 -128 -1376 -128 WIRE -1648 -112 -1648 -240 WIRE -1648 -112 -1712 -112 WIRE -1200 -112 -1200 -240 WIRE -1200 -112 -1264 -112 WIRE -1776 -96 -1824 -96 WIRE -1328 -96 -1376 -96 WIRE -1824 -64 -1824 -96 WIRE -1376 -64 -1376 -96 WIRE -2336 -16 -2336 -80 WIRE -2304 -16 -2336 -16 WIRE -2704 16 -2752 16 WIRE -2752 48 -2752 16 WIRE -2336 64 -2336 -16 WIRE -2336 64 -2416 64 WIRE -2256 64 -2336 64 WIRE -2416 96 -2416 64 WIRE -2256 96 -2256 64 WIRE -2464 112 -2480 112 WIRE -2192 112 -2208 112 WIRE -2752 160 -2752 128 WIRE -2464 176 -2464 160 WIRE -2208 176 -2208 160 WIRE -1104 224 -1104 -240 WIRE -1104 224 -1232 224 WIRE -1104 256 -1104 224 WIRE -1232 288 -1232 224 WIRE -1232 288 -1280 288 WIRE -2624 304 -2720 304 WIRE -2256 304 -2256 176 WIRE -2256 304 -2576 304 WIRE -2208 304 -2256 304 WIRE -1536 304 -2208 304 WIRE -1344 304 -1536 304 WIRE -1232 320 -1280 320 WIRE -2624 336 -2624 304 WIRE -2576 352 -2576 304 WIRE -1232 384 -1232 320 WIRE -1104 384 -1104 336 WIRE -1104 384 -1232 384 WIRE -2624 432 -2624 416 WIRE -2576 432 -2576 400 WIRE -2576 432 -2624 432 WIRE -2624 464 -2624 432 WIRE -1104 480 -1104 384 WIRE -1104 480 -1232 480 WIRE -1056 480 -1104 480 WIRE -1104 512 -1104 480 WIRE -1232 528 -1232 480 WIRE -1232 528 -1280 528 WIRE -2624 544 -2720 544 WIRE -2416 544 -2416 176 WIRE -2416 544 -2576 544 WIRE -2352 544 -2416 544 WIRE -1536 544 -2352 544 WIRE -1344 544 -1536 544 WIRE -1232 560 -1280 560 WIRE -2624 576 -2624 544 WIRE -2576 592 -2576 544 WIRE -1232 640 -1232 560 WIRE -1104 640 -1104 592 WIRE -1104 640 -1232 640 WIRE -2624 672 -2624 656 WIRE -2576 672 -2576 640 WIRE -2576 672 -2624 672 WIRE -1104 672 -1104 640 WIRE -2624 704 -2624 672 FLAG -2608 -192 0 FLAG -2416 -336 vset FLAG -1056 480 Vo FLAG -1136 -240 Va FLAG -1104 672 0 FLAG -2256 -128 0 FLAG -2016 -240 error FLAG -2304 -16 vfb FLAG -1584 -240 Vctl FLAG -2352 544 v_mv FLAG -1824 -64 0 FLAG -1376 -64 0 FLAG -2704 16 fmode FLAG -2752 160 0 FLAG -2464 176 0 FLAG -2480 112 fmode FLAG -2208 176 0 FLAG -2192 112 fmode FLAG -2720 544 MV FLAG -2624 704 0 FLAG -1536 544 v_mv FLAG -2208 304 v_mi FLAG -2720 304 MI FLAG -2624 464 0 FLAG -1536 304 v_mi SYMBOL voltage -2608 -320 R0 WINDOW 0 39 39 Left 2 WINDOW 3 -136 173 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 SYMATTR InstName V_SET SYMATTR Value PWL(0us 0 1us {-set}) SYMBOL res -1120 240 R0 WINDOW 0 48 37 Left 2 WINDOW 3 36 89 Left 2 SYMATTR InstName Rs SYMATTR Value {Rs} SYMBOL res -1120 496 R0 WINDOW 0 46 32 Left 2 WINDOW 3 39 87 Left 2 SYMATTR InstName Rdut SYMATTR Value {Rdut} SYMBOL cap -1696 -256 R90 WINDOW 0 0 32 VBottom 2 WINDOW 3 32 32 VTop 2 SYMATTR InstName Cint SYMATTR Value 1nF SYMBOL OpAmps\\opamp -2176 -240 R0 WINDOW 0 18 93 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U1 SYMATTR Value "" SYMATTR SpiceModel opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL res -2352 -320 R0 WINDOW 0 -36 38 Left 2 WINDOW 3 -53 72 Left 2 SYMATTR InstName R1 SYMATTR Value 10k SYMBOL res -2352 -176 R0 WINDOW 0 -37 34 Left 2 WINDOW 3 -51 71 Left 2 SYMATTR InstName R2 SYMATTR Value 10k SYMBOL res -2112 -320 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R3 SYMATTR Value 10k SYMBOL res -1856 -256 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName Rint SYMATTR Value 10k SYMBOL OpAmps\\opamp -1744 -176 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U2 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL res -1680 -352 R90 WINDOW 0 -9 96 VBottom 2 WINDOW 3 -36 8 VTop 2 SYMATTR InstName Rd1 SYMATTR Value 10Meg SYMBOL res -1424 -256 R90 WINDOW 0 0 56 VBottom 2 WINDOW 3 32 56 VTop 2 SYMATTR InstName R4 SYMATTR Value 10k SYMBOL OpAmps\\opamp -1296 -176 R0 WINDOW 0 21 92 Left 2 WINDOW 3 -10 118 Left 2 SYMATTR InstName U3 SYMATTR Value opamp1 SYMATTR SpiceLine "" SYMATTR SpiceLine2 "" SYMBOL res -1232 -256 R90 WINDOW 0 -7 54 VBottom 2 WINDOW 3 36 40 VTop 2 SYMATTR InstName R5 SYMATTR Value 10k SYMBOL OpAmps\\opamp -1312 368 R180 WINDOW 0 24 96 Left 2 WINDOW 3 1 29 Left 2 WINDOW 39 -25 -2 Left 2 SYMATTR InstName U4 SYMATTR Value inamp1 SYMATTR SpiceLine Rg=12.35k SYMATTR SpiceLine2 "" SYMBOL OpAmps\\opamp -1312 608 R180 WINDOW 0 19 98 Left 2 WINDOW 3 2 28 Left 2 WINDOW 39 -12 -4 Left 2 SYMATTR InstName U5 SYMATTR Value inamp1 SYMATTR SpiceLine Rg=1e12 SYMATTR SpiceLine2 "" SYMBOL voltage -2752 32 R0 WINDOW 3 37 79 Left 2 WINDOW 123 0 0 Left 0 WINDOW 39 0 0 Left 0 WINDOW 0 25 19 Left 2 SYMATTR Value {fmode} SYMATTR InstName Vmode SYMBOL sw -2416 192 M180 WINDOW 0 18 106 Left 2 WINDOW 3 8 8 Left 2 SYMATTR InstName S1 SYMATTR Value SW1 SYMBOL sw -2256 192 R180 WINDOW 0 18 106 Left 2 WINDOW 3 8 8 Left 2 SYMATTR InstName S2 SYMATTR Value SW2 SYMBOL e -2624 560 M0 SYMATTR InstName E_MV SYMATTR Value { 1.0 } SYMBOL e -2624 320 M0 SYMATTR InstName E_MI SYMATTR Value {0.01 / 5} TEXT -3512 -440 Left 2 ;SMU FVFI Basic TEXT -3504 -400 Left 2 !.tran 200us TEXT -2592 -432 Left 2 ;Set Point TEXT -2224 -440 Left 2 ;Error Amp TEXT -1800 -448 Left 2 ;Controller\n(Integrator) TEXT -1368 -448 Left 2 ;Output Amp TEXT -984 256 Left 2 ;Current\nSense TEXT -976 496 Left 2 ;Device\nUnder\nTest TEXT -2256 -32 Left 2 ;Feedback TEXT -3776 -360 Left 2 ;.param fmode=0V FV=5V set=FV Rs=1k Rdut=10k TEXT -3776 -320 Left 2 !.param fmode=5V FI=0.01 set=FI/0.01A*5V Rs=100 Rdut=50 TEXT -1440 208 Left 2 ;Measure Current TEXT -1424 448 Left 2 ;Measure Voltage TEXT -3168 728 Left 2 ;bot TEXT -3568 264 Left 2 !* pin order in- in+ out\n.SUBCKT OPAMP1 1 2 3\nEGAIN 3 0 2 1 1000K\n.ENDS TEXT -3568 424 Left 2 !* pin order in- in+ out\n.SUBCKT INAMP1 1 2 3\n*EGAIN 3 0 2 1 5\nEGAIN 3 0 value={ (V(2)-V(1)) * (1+49.4k/Rg) }\n.ENDS TEXT -3568 616 Left 2 !.model SW1 SW(Ron=1 Roff=1Meg Von=0V Voff=5V ) TEXT -3568 648 Left 2 !.model SW2 SW(Ron=1 Roff=1Meg Von=5V Voff=0V ) TEXT -2712 152 Left 2 ;0V = FV\n5V = FI TEXT -1184 264 Left 3 ;+\nVs\n- TEXT -1184 520 Left 3 ;+\nVo\n-